Lagertechnik für Reinraumtechnologie

- Cleanroom storage and Transport System for Silicon Wafers in cleanroom up to ISO class 4 - Temporary storage of the FOUPs in double depth racks - Automatic unloading and delivery of the material to be conveyed from mobile trolleys - Manual recording of FOUP and open cassettes - Place detection by the camera system

• #science_technology
• #reinraum
• #reinraumtechnik
• #lagertechnik
• #stocker
• #transportsystem
• #transporttechnik
• #iso_klasse_4
• #siliciumwafer
• #foups
• #oht_systeme
• #oht
• #swarepro
• #lagerverwaltung
• #lagerverwaltungssoftware
• #cleanroom
• #cleanroom_technology
• #warehouse_system
• #overhead_conveyor_system
• #storage_and_retrieval_units
• #special_solutions_for_wafer_preservation
• #n2_purging