Dry Etch TPT Training – ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
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This video introduces the batch
This video introduces the batch recipes on the DRIE-Pegasus 1. These recipes are used in systems with a cassette loader and they combine process recipes with a batch of wafers.
هفته قبل
در تاریخ 1403/04/06 منتشر شده
است.
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