Introduction to Auger Electron Spectroscopy

The Materials Characterization Lab: Auger Electron Spectroscopy
A Scanning Auger Microscope is an instrument that combines the spatial resolution of an electron microscope with the surface sensitivity of XPS. A focused electron beam (3-20 keV) is scanned across a sample. Atoms near the surface are ionized, and a fraction of the ionized atoms relax via the Auger process.

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