The Entegris EUV Reticle Pod
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5 سال پیش
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The EUV pod from Entegris
The EUV pod from Entegris is a dual pod design having both an inner carrier and outer shell to maintain a contamination-free environment. In laboratory tests, the EUV pod was shown to provide defect-free protection of EUV reticles during shipping, storage, handling and vacuum-transferring operations with 40 nm SiO2 equivalent particle sizes.
5 سال پیش
در تاریخ 1398/03/24 منتشر شده
است.
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