H-Square: Low Contact Wafer Transfer - LCT6 ASM
1.1 هزار بار بازدید -
11 سال پیش
-
H-Square Corporationwww.h-square.comPlease contact us with
H-Square Corporation
www.h-square.com
Please contact us with any questions at: [email protected]
© 2013 H-Square Corporation
High Performance Wafer Handling Products:
LCT - LOW CONTACT TRANSFER SYSTEM
Low contact transfer machine provides a safe means of mass transferring wafers from cassette to cassette. Wafers are gently lifted midpoint in the cassette slots before extracting or loading them to minimize contact with the cassette which could cause particulation or wafer edge chipping. Optical and mechanical sensors combined with software logic guard against operation errors such as trying to transfer wafers into a cassette which is already loaded with wafers. User-friendly fail-safe operation features simple one-button actuation. Sturdy construction assures high reliability and robustness required in high throughput fabs. Small footprint saves valuable cleanroom space.
Additional substrate sizes are available.
Ultra thin wafer versions available (less than 220 microns).
www.h-square.com
Please contact us with any questions at: [email protected]
© 2013 H-Square Corporation
High Performance Wafer Handling Products:
LCT - LOW CONTACT TRANSFER SYSTEM
Low contact transfer machine provides a safe means of mass transferring wafers from cassette to cassette. Wafers are gently lifted midpoint in the cassette slots before extracting or loading them to minimize contact with the cassette which could cause particulation or wafer edge chipping. Optical and mechanical sensors combined with software logic guard against operation errors such as trying to transfer wafers into a cassette which is already loaded with wafers. User-friendly fail-safe operation features simple one-button actuation. Sturdy construction assures high reliability and robustness required in high throughput fabs. Small footprint saves valuable cleanroom space.
Additional substrate sizes are available.
Ultra thin wafer versions available (less than 220 microns).
11 سال پیش
در تاریخ 1392/03/08 منتشر شده
است.
1,143
بـار بازدید شده