Molecular Flow in an Ion-Implant Vacuum System, Chapter 1
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This is Chapter 1 of
This is Chapter 1 of a 2-chapter tutorial depicts how you can model an ion implantation system by utilizing the Molecular Flow interface available in the COMSOL Multiphysics Microfluidics Module. Steps included in this chapter: adding physics, building the model, and meshing. Watch Chapter 2: http://youtu.be/ITL52-eCfJc
Learn more about this model at www.comsol.com/vacuum
6 سال پیش
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